Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies
نویسندگان
چکیده
Abstract A comprehensive review is presented on the advances achieved in past years fundamental and applied materials science of diamond films engineering to integrate them into new generations microelectromechanical system (MEMS) nanoelectromechanical systems (NEMS). Specifically, focuses describing performed develop thin film synthesis processes characterization chemical, mechanical, tribological electronic properties microcrystalline diamond, nanocrystalline ultrananocrystalline technologies, research development focused integration with other film-based materials. The includes both theoretical experimental work optimizing resulting achieve best possible MEMS/NEMS devices performance produce generation external environmental sensors energy devices, human body implantable biosensors electron field emission many more transformational positive impact way quality life people worldwide.
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ژورنال
عنوان ژورنال: Journal of Materials Science
سال: 2021
ISSN: ['1573-4803', '0022-2461']
DOI: https://doi.org/10.1007/s10853-020-05699-9